Description  :

Applied Materials Endura 5509 PVD Tool
Manufacturer Applied Materials
Model 5500
Specifics
Wafer Size 150 mm
Wafer Shape JMF
Cassette Type PEEK A196-60ML-47C02 MOD – Supplier Metron
Wafer Handling
Buffer Robot HP
Transfer Robot HP
Load Lock A Narrow Body Tilt Out Type
Load Lock B Narrow Body Tilt Out Type
Control System
CPU SBC
Software Revision C8.5
Standard Hard Drive
Video Board Type Video board
Floppy Drive 3 1/2 inch Drive
Standard Front Monitor AMAT 5500 through wall monitor assembly with lightpen
Standard Rear Monitor with Interface Box AMAT 5500 rear monitor base assembly with lightpen
Chamber Positions
A Pass Through

B Cool Down

C N/A

D
Process Preclean 11w Turbo
Power Supply LF – 400KHZ Comdel CPS1001S
Power Supply HF – 13.56MHz RF Power Products LF10A
Turbo Pump Leybold Turbovac 361C
E Orienter / Degas
F Orienter / Degas

1
Body Type Wide Body CoTi
Process CoTi clamped
Power Supply 12kw & 12kw Master/Slave
2
Body Type Wide Body CoTi
Process CoTi clamped
Power Supply 12kw
3
Body Type Wide Body TTN
Process TiN
Power Supply 12kw
4
Body Type Standard
Process Aluminium
Power Supply 18kw
Chamber Options
Chamber clear lid At chamber B
RGA Port / Manual isolation valve. At chambers 1,2,3,4
Stepper Motor Lifts At chambers 1,2,3,4
Process Improvement Kit 11 At chamber D
Support Equipment
Neslab Heat Exchanger Quantity – 1
Cryo Compressors Helix Water Cooled 9600 LV 50Hz – Qty 2
Cryo Pumps Helix On Board Enhanced E8F 3PH – Qty 6
Cryo Motor Controllers/Frequency Converters Motor Controller- Qty 2
Cryo Helium Lines 3/4″ x 20 feet, Quantity – 4
Cryo Cables On Board Power & Network cables
Roughing Pump Edwards
Pre-Clean Pump Edwards
Gas Box
MFC Manufacturer: STEC
MFC Model: 4400
Gas Panel Config per chamber TBC
Electrical
Main Supply 415V 50Hz (Mainframe and Support Equip. for 50Hz supply)
General
Transformer Mains Matching Transformer (415 – 208V 50Hz)
Mainframe / Support equipment Interface Cabling 50 ft cabling